JPH0189737U - - Google Patents
Info
- Publication number
- JPH0189737U JPH0189737U JP18576187U JP18576187U JPH0189737U JP H0189737 U JPH0189737 U JP H0189737U JP 18576187 U JP18576187 U JP 18576187U JP 18576187 U JP18576187 U JP 18576187U JP H0189737 U JPH0189737 U JP H0189737U
- Authority
- JP
- Japan
- Prior art keywords
- air
- air injection
- air gun
- injection nozzle
- gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18576187U JPH0189737U (en]) | 1987-12-04 | 1987-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18576187U JPH0189737U (en]) | 1987-12-04 | 1987-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189737U true JPH0189737U (en]) | 1989-06-13 |
Family
ID=31477028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18576187U Pending JPH0189737U (en]) | 1987-12-04 | 1987-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189737U (en]) |
-
1987
- 1987-12-04 JP JP18576187U patent/JPH0189737U/ja active Pending